EX-21.1 3 veco-20241231xex21d1.htm EX-21.1

Exhibit 21.1

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Subsidiaries of the Registrant

As of December 31, 2024

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Subsidiary

    

Jurisdiction of Organization

    

Percentage Ownership(A)

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U.S. Subsidiaries

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Ultratech International Inc.

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DE

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100%

Veeco APAC LLC

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DE

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100%

Veeco Process Equipment Inc.

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DE

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100%

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Foreign Subsidiaries

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Veeco Asia Pte. Ltd.

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Singapore

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100%

Veeco GmbH

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Germany

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100%

Veeco Instruments Limited

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England

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100%

Veeco Instruments (Shanghai) Co. Ltd.

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China

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100%

Veeco Japan Ltd.

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Japan

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100%

Veeco Korea LLC

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South Korea

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100%

Veeco Malaysia Sdn. Bhd.

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Malaysia

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100%

Veeco Netherlands BV

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Netherlands

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100%

Veeco SiC CVD Systems AB

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Sweden

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100%

Veeco Taiwan Inc.

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Taiwan

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100%

Ultra-Tech Technologies Israel Ltd.

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Israel

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100%


(A)Includes direct and indirect ownership.